Physical and chemical characteristics
|
Molecular weight
|
Melting point
|
Boiling point
|
Critical temperature
|
critical pressure
|
Liquid density
|
gas density
|
Solubility in water
|
CASNo
|
Danger classification
|
71.01
|
-206.8℃
(1atm)
|
-129℃
(1atm)
|
-39.3℃
|
44.02atm
(4.46MPa)
|
1554kg/m3
(1atm at the boiling point)
|
2.95kg/m3
(1atm 21℃)
|
the normality of 1.43*10-5
(1atm,22℃)
|
7783-54-2
|
the 2.3-grade toxic gas. The maximum allowance content in air is
29mg/m3
|
|
Package (Nitrogen trifluoride gas is ladled in seamless steel cylinders. The package may be changed upon users’ requirements.)
|
the steel cylinder capacity
|
The steel cylinder type
|
Valves
|
Cylinder pressure
|
Gas mass
|
Danger No
|
UN Code
|
Package classification
|
package symbol
|
47L、43.3L、40L、8L
|
DOT-3AA、GB5099
|
CGA330、CGA640
|
9.0-13.0MPa
|
22kg、20kg、3.4kg
|
23016
|
2451
|
Ⅱ
|
6
|
|
Storage and transportation
|
The gas cylinders of NF3 should be stored in a cool and ventilating warehouse where the temperature of above 30℃ is inappropriate. The gas cylinders of NF3 must be far away from fire, heat sources and sunshine and also be isolated from reducing agents, combustible or flammable matters.
|
The gas cylinders of NF3 must be loaded and unloaded gently to avoid damage of cylinders and accessories during the shifting.
|
The gas cylinders of NF3 must be transported according to requirements of dangerous cargo. The cylinders should be fixed with stationary clamps and shipped on vehicle roads or in containers.
|
Emergent handling for leakage
|
In a case of leaking of NF3, working personnel must withdraw from the leakage area immediately and take measures to prevent the further leakage to the best of your ability. The poisoned personnel should be sent to the hospital promptly.
|
Personnel must wear protective masks, preferably with self-contained barotropic respiratory, to handle the leaking site as early as possible. Personnel can enter the leaking site until it is detected to be safe and the leakage containers may be used again through examinations, repair or other treatments.
|
Quality standard of NF3 gas product(Q/718J58-2004)
|
Impurities
|
NF3≥99.995% Vol.%
|
NF3≥99.99% Vol.%
|
NF3=99.99% Vol.%
|
NF3≥99.9% Vol.%
|
CF4
|
≤25 Vol.ppm
|
≤40 Vol.ppm
|
≤80 Vol.ppm
|
≤300 Vol.ppm
|
N2
|
≤5 Vol.ppm
|
≤5 Vol.ppm
|
≤5 Vol.ppm
|
≤50 Vol.ppm
|
O2+Ar
|
≤5 Vol.ppm
|
≤5 Vol.ppm
|
≤5 Vol.ppm
|
≤50 Vol.ppm
|
CO2
|
≤1 Vol.ppm
|
≤2 Vol.ppm
|
≤2 Vol.ppm
|
≤10 Vol.ppm
|
H2O
|
≤1 Vol.ppm
|
≤1 Vol.ppm
|
≤1 Vol.ppm
|
≤10 Vol.ppm
|
HF
|
≤1 Vol.ppm
|
≤1 Vol.ppm
|
≤1 Vol.ppm
|
≤10 Vol.ppm
|
SF6
|
≤1 Vol.ppm
|
≤2 Vol.ppm
|
≤2 Vol.ppm
|
≤10 Vol.ppm
|
N2O
|
≤1 Vol.ppm
|
≤2 Vol.ppm
|
≤2 Vol.ppm
|
≤10 Vol.ppm
|
CO
|
≤1 Vol.ppm
|
≤2 Vol.ppm
|
≤2 Vol.ppm
|
≤10 Vol.ppm
|
|